Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 526 - 537
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 458 - 468
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 610 - 618
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 619 - 631
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 632 - 639
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 561 - 569
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 589 - 598
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 599 - 609
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 663 - 674
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 581 - 588
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 640 - 646
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 433 - 442
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 657 - 662
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 683 - 689
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 443 - 450
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 647 - 656
Journal of Microelectromechanical Systems > 2010 > 19 > 3 > 700 - 705